Partner: Z. Rimuza

Warsaw University of Technology (PL)

Recent publications
1.Abetkovskaya S.O., Chizhik S.A., Pogoskaya I.V., Rimuza Z., Jarząbek D., Mikhalovski M., Linke Ya., Determining the Young Modulus of Nanosize Thickness Coatings for MEMS from the Results of Static Force Spectroscopy, Bulletin of the Russian Academy of Sciences: Physics, ISSN: 1062-8738, DOI: 10.3103/S1062873812090031, Vol.76, No.9, pp.1009-1011, 2012
Abstract:

A method for the nanoidentation of resistance coatings 1–100 nm thick and intended for use in microelectromechanical systems is proposed on the basis of atomic-force microscopy (AFM). The elastic moduli of the coatings are determined using three models of contact: the Hertz model, the Johnson–Kendall–Roberts model and the Makushkin model, with and without allowance for the influence of a solid substrate

Affiliations:
Abetkovskaya S.O.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Chizhik S.A.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Pogoskaya I.V.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Rimuza Z.-Warsaw University of Technology (PL)
Jarząbek D.-other affiliation
Mikhalovski M.-other affiliation
Linke Ya.-Warsaw University of Technology (PL)