Instytut Podstawowych Problemów Techniki
Polskiej Akademii Nauk


M. Gwiazda

Warsaw University of Technology (PL)

Ostatnie publikacje
1.  Jarząbek D.M., Gwiazda M., Dera W., The Influence of Alkali Metal Chloride Treatments on the Wear Resistance of Silicon Surfaces for Possible Use in MEMS, TRIBOLOGY TRANSACTIONS, ISSN: 1040-2004, DOI: 10.1080/10402004.2017.1296211, Vol.61, No.1, pp.178-184, 2018

The wear of contacting silicon surfaces in microelectromechanical systems (MEMS) has been a longstanding concern. To address this issue, the effects of immersing silicon surfaces into alkali metal chloride solutions (LiCl, NaCl, CsCl) on their sliding friction and wear were investigated. A custom-built reciprocating tribometer was used with a sapphire ball as the counterbody. Results indicated that the friction coefficient between the silicon surface (p-doped, orientation (100)) and a sapphire ball can be reduced by up to 30% by treating the silicon surfaces in aqueous salt solutions (concentration 1 mol/L, exposure for 24 h). These modified surfaces also have higher wear resistance and a significant change in wettability. After immersion, the contact angle between the silicon surface and water was reduced by approximately 50%. These results may lead to new, simple, and inexpensive methods to increase the wear resistance of silicon surfaces for use in MEMs devices.

Słowa kluczowe:
silicon surface, wear, friction, alkali metal chlorides

Afiliacje autorów:
Jarząbek D.M. - IPPT PAN
Gwiazda M. - Warsaw University of Technology (PL)
Dera W. - IPPT PAN

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